• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A position drive for a wafer in a system for testing of integrated circuit components of the wafer includes a first drive assembly for quick lifting of a wafer-supporting member towards testing probes, second drive assembly for positioning the wafer-supporting member in two stable positions in a vertical direction for compensating thickness allowances of the wafers to be tested and a third drive assembly for mechanical rotation of the wafer-supporting member through any required angle.
    公开号:SU1451786A1
    申请号:SU817772035
    申请日:1981-09-07
    公开日:1989-01-15
    发明作者:Эберхард Рисланд；Карл-Хейнц Крюгер
    申请人:Фэб Центрум Фюр Форшунг Унд Технологи Микроэлектроник (Инопредприятие)；
    IPC主号:
    专利说明:

    The invention relates to servo drives that can be used to measure semiconductor ilastins up to 150 mm in diameter on devices for testing semiconductor wafers, and the semiconductor wafer can have a different thickness.
    Known servo auth. St. No. 930771.
    However, the known device does not provide accurate positioning. ,
    The purpose of the invention is to improve the positioning accuracy.
    FIG. 1 given servo, general view; in fig. 2 shows a section A-A in FIG. 1 in FIG. 3 - the image of two poles placed in a bearing ring; in fig. 4 - drive stator for adjusting the working mark; in fig. 5 stator fastening assembly for adjusting the working mark; in fig. 6 - the first light barrier; Fig, 7 - the second light barrier; in fig. 8 - attachment unit. ..
    The servo 10 is mounted on the base plate 11. It is covered by a casing 12J fixed with screws 13 on the base plate 11, the Base plate t1 is equipped with a drilled central hole bordered by a centering shoulder 11.1, the spindle sleeve 15 is mounted on the centering shoulder 11.1 and secured to the foundation spindle with screws 11. In addition, the base plate 11 is equipped with threaded bushings 16 for securing structural elements, as well as the first stop screw 17, the stop pin of which 17.1 goes out and the limits of the level of the base plate 11. The threaded sleeve 15 is provided at the bottom with an external thread 15.1, while the upper part forms a cylindrical bearing surface 15.2. In addition, the upper part is drilled with several vertically flared longitudinal holes 15.3,
    A nut 18 is fitted to the external thread 15.1, to which a gear 19 of a gear of magnet iron is attached. The second stop screw 21 is attached to the gear. Gear 19 so that its stop pin 21.1 exerts in the condition of the engine
    five
    0
    five
    0
    five
    0
    five
    0
    five
    Press down the gear wheel 19 through the nut 18 relative to the spindle sleeve 15 to coordinate with the stop pin 17.1 so as to prevent further rotation.
    The nut 18 is provided with a shoulder on which a bearing ring 22 is mounted. The bearing ring 22 has an upper and lower bearing surface, each of which has one ball ring 23. The upper and lower interconnecting bearings of the bearings 24 are formed together with the bearing ring 22 for ball rings 23 axial bearing. A sleeve 25 is mounted on the upper bearing liner 24, the inner opening of which is formed as a bearing surface -25.1.
    A bearing cage 26 with balls 27 is mounted between the support surfaces 15.2 and 25.1. The sleeve 25 is also provided with holes 25.2 and the ball bearing cage 26 is equipped with longitudinal holes 26.1 matched with 15.3 longitudinal holes that pass t through the further described electrical and pneumatic wiring.
    A lifting electromagnet 30 is mounted on the shoulder of the sleeve 25, and the inner ring 31 of the lifting electromagnet 30 is fixed by screws with a shoulder on the sleeve 25 to the upper bearing shell 24 (the screws are shown conventionally by a dashed line). The inner ring 31 contains corresponding to the holes 25.2 openings 31.8, and also an opening 31,2 with a female thread.
    A connecting nozzle 32 is screwed into the hole 31.2, extending into each of the holes 25.2 and the longitudinal holes 26.1 and 15.3 inside the spindle sleeve 15 where the hose fitting 33 is fixed. Outside, the inner ring 31 is surrounded by a magnetic holder 34, equipped with a permanent electromagnet 35,
    The magnet holder 34 is equipped with a canal system 34.1 connecting the opening 31.2 with concentrically distributed nozzles 36, with the nozzles 36 ending on the top and bottom sides of the magnetic holder 34, the Magnetic holder 34 is surrounded by two outer rings 37. Inside the mold;
    A single earth ring 37 and a system of permanent electromagnets 35 of the space are placed along one coil 38 and an insulating ring 39. In this case, the coils 38 are isolated in the same way. The ends of the windings of the two coils 38 are connected to the three soldering ears 41, respectively, glued by means of | Sleeves 42 into the holes 34.2. The inside of the holes 31.1. The part of the soldering lugs 41 is provided with a thread onto which the adapter 43 is screwed, which is inserted into the inner space of the spindle sleeve 15.
    The inner ring 31, the magnet holder 34 and, respectively, along one outer ring form the upper and lower surfaces 44, 45 of the air bearing.
    The configuration of the lifting electromagnet 30 is rotationally symmetric and the electromagnet is enclosed by a support frame 50, which also has a rotationally symmetric configuration. The support frame 50 consists of a gear ring 51 to which the upper and lower plates 52, 53 are attached in the form of a support ring. In addition, the top plate 52 is equipped with threaded sleeves 54.
    Between toothed ring 50 and permanent electromagnets 35 there is an air gap on the order of 0.2 MM. In addition, the plates 52, 53 are provided with ventilation openings (not shown).
    The distance of the plates 52, 53 of the support frame 50 is 0.4 mm greater than the distance of the surfaces of the air bearings 44, 45, which, as a result of coordinated action with the permanent electromagnets 33, result in two stable positions of the support frame 50 with respect to the lifting electromagnet 30 , namely, the upper and lower position. Due to the pulses fed to the coils 38, the support frame 50 is switched between the firing positions.
    When compressed air is supplied to lang fittings 38, depending on
    Four legs 66 are attached to the flange 61, into which one sleeve 67 is screwed in. At the same time, the screw-in mark of the bearing ring 60 can be adjusted using the sleeves 67 to fix the position. 50, the bearing ring 60 is barely centered with air bearings; bearing ring 60 is considered screwed through sleeves 67 with screws 67 and gaskets in the form of
    from the selected stable position of the spherical segments 69 to the threaded between the surface 44 of the air bushings 16. spike m with the plate 52 or between the surface 45 of the air bearing and the plate 53 with the help of the nozzle pompe 36 in the flanges 61 of the flange 61, fastened with pins 71 in the flange 61. Each
    Air bearing with a clearance of 10-20 microns.
    When switching the support coils 38, the frame 50 moves from one position to another, an air bearing forms and acts as a shock absorber, as a result of which the switching takes place with low vibrations or vibration-free.
    The support frame 50 forms, in combination with the gear ring 51, an electric motor mounted in the bearing ring 60. One flange 15 .61 of the bearing ring 60 encloses the gear ring 51. The flange 61 of the supplies is circumferentially circumscribed by eight bevels, after which 8 surfaces 61.1 are retained. Between flange 20 61 and toothed ring 51 there is a gap of about 10-20 microns for an air bearing. On the surfaces 61.1, nozzles 62 are located, connecting the gap with the distribution chamber 63. 25, the distribution chamber 63 is sealed with a plate 64. For each of the eight distribution chambers, channel system 61.2, which is connected 0 with a hose fitting 65, is provided in flange 61.
    Based on the rotationally symmetrical design of the support frame 50, the support frame 50 can rotate around the lifting electromagnet 30, jg and the support frame 50 is held in eight air bearings between the gear ring 51 and the surfaces 61.1 radially, and in the axial position, respectively, in one air Q bearing between the surface of the air bearing 44 and the plate 52 or the surface of the air bearing 45 and the plate 53.
    Four legs 66 are attached to the flange 61, into which one sleeve 67 is screwed in. The screwing-in mark of the bearing ring 60 can be adjusted using the sleeves 67 to fix the position. By barely centering the bearing ring 60 with air bearings, the bearing ring 60 is considered screwed through the sleeves 67 with screws 67 and gaskets in the form of
    five
     spherical segments 69 to threaded bushings 16.
    spherical segments 69 to threaded bushings 16.
    In the chamfered flange 61 are poles 70, fastened with pins 71 in flange 61. Each
    51451786 6
    pole 70 is provided with two gear sections between gear ring 5.1 and ci mmp 72. Two poles 70 with corresponding poles 70 in the angular position.
    but connected to one permanent electromagnet 73. One coil 74 winds up to the second pole 70, the ends of the windings of which are connected to the solder 75 lugs. The soldering lugs 75 are located on the strip 76 attached to the poles 70..
    The toothed segments 72 and the toothed ring 51 are provided with equal pitch teeth of a magnetizable material (not shown). In this case, the gap is filled with a non-magnetic material. The four jagged segments 72 of the two magnetic poles interconnected magnetically are displaced with respect to their pitch, due to which, under the conditions of the exciting excitation, the coils 74 value each poles 70 and the toothed ring 51 result in a tangential the force, as a result of which the support frame 50 rotates within the above-described air bearings.
    A gear 19 forms complete with a stator; -1 and 80 are still one drive to adjust the working mark.
    The stator 80 is equipped with two holders for poles 81, a permanent electromagnet 82 is inserted into the gap between them. The holder for an IC 81 is equipped with two poles 83 (each) the first of which is equipped with a coil 84. The body of a pole-arm rotor 81 and a permanent electromagnet 32 are interconnected by a contacting sleeve 85. The soldering attachment ears 86, which are connected to the ends of the windings, are insulated to the holder 85. coils 84.
    The gear gear 19 is equipped with teeth 19.1, similarly as teeth 83.1 for poles 83, between which there is a gap on the order of 0.15 mm. Tooth 83.1 is displaced along the pitch between pole 83 and pole 83 so that under the conditions By suitably driving the serrated teeth 84 coils 84, they rotate and move the lifting electromagnet 80 together with the support frame 50 up and down through the nut 18 and the spindle sleeve 15. The support frame 50 in this case does not make any wrap-, amateur movements, as it is held at I1:) by the power of the electromagnetic si
    On each stator 80, with the aid of screws 88, two blocks 87 are mounted, which are connected to the base plate 11 with POM1D screws 89. The support frame 50 is provided with a support surface for the semiconductor plates 100.
    The support surface for the plates 100 is mounted on the support ring 101, on the circumference of which the adjustment screws 102 are located. The support ring 101 is fixed in the threaded bushings
    54 by means of screws. Here, the adjustment screws 102 are intended to adjust the rotation of the support surface for plates with no beating due to skew.
    The support ring 101 is provided with an axial bore. Inside the hole is a sleeve 103, and in it a sealing piston 104, the sealing piston .104 has a hose nozzle -105 for
     vacuum supply, hose nozzle 106 for supplying compressed air, as well as an electrical connection unit 107 for contacting with a semiconductor, nickel plate ...
    Hairpin 1.08, locked captive in support-. 10 K ring with a pin enters through a sleeve. 103 inside the annular groove 104.1 of the sealing piston
    .1 rv y
    I,
    Thus, axial fixation of the sleeve and the sealing piston is ensured. 104 and the support ring 101 may rotate around the sealing piston 104,
    In addition, an insert 109 is inserted into the opening of the support ring 101. A cone 111 is located between the insert 109 and the retracting piston 104.
    with a compression spring.112, which provides electrical contact from connection 107 through the sealing piston 104 to insert 109.
     A support for semiconductor wafers 113, fastened with a screw 14 on an insert 109, is centered on the support ring 101 and fixed with an insert 109. This screw 14 is designed to electrically connect the base for plates 113 and vstaak 109. The tray 113 for plates is radial holes 113, 1 and -113.2, which are plugged with expansion screws 115,
    The first duct system 116 connects the hose nozzle 106 to the openings 113.1 connected to the inclined holes 113.3, which are all directed in the same direction, held close to the surface of the tray for the semiconductor wafers 113. Under the influence of supplied compressed air on the hose nozzle 106, the semiconductor a plate (not shown) moves from the tray for plate 113 on the air cushion in the direction of movement.
    From the hose nozzle 105 to the hole 113.2, a second duct system 117 was conducted,
    Along the hole 113.2 there are several valves 118. Valves 118
    Using screws 119, it is possible to fix the fixtures of the base plate 11 in two positions, which, depending on the position, release a further supply of vacuum through the hole 113.2 or the communication with the ring grooves 113.4 or block them. In addition, eight inclined holes 113.5 are drilled from the channel system 117 to the surface of the pan for the plates 113. Thus, under the conditions of supplying vacuum to the hose nozzle 105 with simultaneous shutdown of the compressed air supply and pshangovye nozzles 106 when passing through the holes 113.5, it is possible to clamp semiconductor plates of mm or 1-1 / 2 in diameter, and after connecting the ring grooves 113.4 It is possible to clamp semiconductor wafers with dimensions from 50 mm or 2 to 150 mm or 6 in diameter.
    The bearing surface for the semiconductor wafers 100 makes all the movements of the supporting frame 50, like.
    for example, turning at any angle, non-45 frame 131 fixed plate 139 with
    discontinuous adjustment of the working mark to equalize the differences in the thickness of the semiconductor wafers and by-action lifting for the purpose of contacting the semiconductor. test plates with probes of a device for testing semiconductor wafers.
    A first light barrier 120 is attached to the flange 61. Between the two teeth 19.1, a mirror plane 121 is glued in, from which light is reflected. This itself determines the initial position of the gear gear 19.
    a plug 141. A plug 141 is closed with a protective 142.
    The device works as follows.
    5Q The rotary portion of the servo actuator rigidly connected to the support for the plates 100 rests on the air cushion of the cylindrical forming support frame 50. At the same time, air is supplied from the nozzles 62 located on the side of the air cushion of the flange 61. The air gap is dimensioned, meaning the outer diameter of the support frame 50 and the inner diameter of the Second light barrier 125 is provided for the supporting frame 50. For this purpose, a jumper 126 is provided on the gear ring 51 with a reflecting mirror end surface 126.1, which closes raektoriyu light transmission in a specific angular position of the support frame 50 in the lowermost position the toothed gear 19.
    If both light barriers 120, 125 have a closed light path, This is followed by a one-zeros determination of the angular position and working mark of the support frame 50 and, thus, the support surface for the plates 100.
    In the recess groove 11.2, the connecting block 130 is surrounded. Hose nozzles 132 are fixed inside the frame body 131, from which hoses (not shown) are held tightly to the hose nozzles 65. Another hose nozzle 133 communicates with a pin nipple 33. Hose nozzles 132 and 133 communicate through channels inside the frame
    131 with a first trunk connecting pipe 134 for supplying the air bearings with compressed air.
    Another trunk connection 135 is communicated via a hose.
    pipe 136 and a hose with a hose pipe 105 and forms a unit for vacuum supply. Another third trunk attachment point 137 is connected through a hose nozzle.
    138 with a hose nozzle 106, and thus assembles the air inlet unit for the pneumatic transfer port assembly.
    On the upper surface of the main
    a plug 141. A plug 141 is closed with a protective 142.
    The device works as follows.
    5Q The rotatable part of the servo actuator rigidly connected to the support for the plates 100 rests on the air cushion of the cylindrical generatrix of the support frame 50. At the same time, air is supplied from the nozzles 62 located on the side of the air cushion of the flange 61. The air gap is dimensioned, meaning the outer diameter of the support frame 50 and the inner diameter of the flange is 61 and ranges from 10 to 20 microns. Without the effect of the actuator for positioning along the Cf axis, therefore, the frame 50 would rotate without limitation in the flange 61, but under the influence of the actuator for positioning along. Axis 1 is set dependent on the appropriate state of the exciter anchor 61 and the support frame 50.
    - The axial position of the support frame 50 is determined by one of the two surfaces with the air sub-hatch 44 / shea 45, depending on whether the support plate 1b is placed in the lower or upper position. The forces exerted by the air cushion are in an equilibrium position with magnetic forces, so that an air gap of from 10 to 20 microns is established in the axial direction. The reason for the magnetic force is the magnetic flux, which is controlled by several permanent electromagnets 35, and this flux flows through the carrier 34 for the electromagnets, through the surface of the support with the air cushion 44, through the plate 52, the supporting frame 50 and the permanent electromagnet 35,
    If a change in the support surface for the plates is assumed to be in a vertical position, for example, switching from the marking in FIG. 2 of the lower position, then the magnetic impact on the surface of the air suction 44 eliminates magnetic coupling due to the magnetic flux penetrating through. airbag support surface. This, for example, 5 is produced by the fact that to a series-connected coils 38, a magnetic flux-generating opposing penetrating support surface of the airbag 44 is supplied to the magnetic flux, and on the other side penetrates the surface of the pillow 45 to be activated, so that the intensity high magnetic attraction forces. Subsequently, as a result, the support frame 50 is moved upward before
    At the same time, the support surface 100 can be rotated by means of an actuator -Lf ka any angle not
    The moment J when the plate 53 with the gg holder, while changing the vertical base of the magnets 34, does not activate the support surface 45 of the air ki. The current flowing around the coil 38 ,, can now be disconnected, as the positioner
    Function ZM Type Drive (FIG. 4) Type Z Drive is an assembly
    rotary stepper motor
    the current of the constant electromagnit 35 almost penetrates through the support the surface of the air cushion 455 and fixes the upper position of the supporting frame (the bistable principle of the lifting electromagnet 30),
    Functions of a lifting electromagnet
    30 and the actuator for positioning C operate completely independently of each other S, despite v.a common bearing surfaces With an air cushion. ; The active part of the lifting electromagnet 30 is movably connected by means of balls 27 and axially connected flush with gear gear 19, which is a rotor for driving in the Z direction.
    And made of magnetic
    materials, the support of the gear wheel is provided by means of a threaded nut 185 rigidly connected to it, which is fitted onto the sleeve from iSfe spindles, so that when the gear gear 19 is rotated, the active movement occurs. parts of the lifting electromagnet 30. Since the support for gsna.stin 100 is connected
    through the support frame .50 and one of the two support surfaces with an air cushion 44 pin 45 with a horn Electromagnet 16} then, together with the rotation of the gear gear t9,
    t-ayuke -and continuous vertical trans-. relocated to base plate 100. for plates.
    . Thus (; this sch1-1y servo drive allows two
    types of independent dru.t from each other vertical movements; accelerated lifting movement of the actuator for electromagnets through a constant step of ordering, for example,
       a quasi-continuous, relatively slow lifting movement of the rotary stepper for directing Z to a distance of, for example, 4 mm. with minimal steps
    single displacement-e nig rimer, 2.5 mm.
    At the same time, the support surface 100 can be rotated with the help of the -Lf type drive;
    Zmen while vertical positioning
    Function ZM Type Drive (Figure 4) The type Z drive is a
    stepper motor rotator1
    go type. A tooth is placed on the forming disc-shaped rotor 19. The stator 80 is equipped with four poles 83 of magnetically soft iron, each of which is equipped with a coil 84 and separated from the rotor 19 by a gap from approximately 0.1-0.2 mm. The poles of soft magnetic iron are also provided with teeth 83.1 with a pitch of engagement T of the rotor 19, and the teeth of the four poles, however, are displaced relative to each other by a step of approximately 0.25 T, Oj5 T and 0.75 T. Permanent electromagnet 82 generates an electromagnetic flux through two poles and a gap in the rotor 19, flows there approximately tangentially to the other two poles, and through them again enters the permanent electromagnet 82.
    Due to the currents in the coils 83. which can take on the values "1, Of -1, the rotor teeth move
    one
    at a certain position relative to 25, have the same pitch between the teeth, the stator teeth. For example, for illustrated in FIG. 4 tooth positions for both top poles can receive coil current
    it 12 Oz FOR coil 84 - current i,
     +1 and for the coil of the lower pole - the current id -1 -1. If now the current load of four coils is changed
    as the support frame, and in the same way as for drive Z according to FIG. 4. between the surface of the poles there is a different displacement of the pitch between the teeth
    30 In the axial direction, the surface p of the step of the supporting frame exceeds the ten segments with the teeth 72 by the amount of movement in the direction of the Z axis in order to ensure a single effect of force for all laid Z.
    from
    ib
    1.1
    i.f
    O, i, O, -1, i. + 1,
    13 +1,
    i3 oh
    - -one
    - five
     ABOUT,
    then the rotor moves by 0.25 T steps (in FIG. 4 this will be in the upward direction), i.e. now the rotor teeth will be in a diametrically opposite position relative to the teeth of the second pole. Another change in current load in
    i 1 О, i - О, i 3 -1, i 4 1 causes additional rotor rotation in the upward direction on. step 0.25 T.
    The function of the electromagnetic drive ejector.
    The electromagnetic drive acts as a bistable drive system and requires, for control, not a static signal, but only electrical pulses, the polarity of which coincides with the desired direction of movement. The advantage is the lack of energy consumption in both stable resting positions.
    Structurally, the support surfaces under the air cushion are made as follows.
    45178612
    that at the end of the movement, due to the compression of air between the surfaces, there is an effective inhibition of movement, as well as the suppression of harmful rebound vibrations.
    Drive function to guide Lf. Functional principle of the drive t / on the principle as much as possible
    The 10th degree corresponds to the principle described for a type Z drive. Shown in FIG. 3 shows a permanent electromagnet 73, the flow of which in both directions is divided into 2 segments with teeth 72. Support frame 51 is a rotor made of magnetic material and which on the cylindrical generatrix has a thin engagement with a rod about
    0.6 mm (not shown). The grooves between the teeth are filled with non-magnetized thermosetting material. Segments with teeth 72 pole surfaces
    have the same pitch between the teeth,
    as the support frame, and in the same way as for drive Z according to FIG. 4. between the surface of the poles there is a different displacement of the pitch between the teeth.
    In the axial direction, the raster surface of the pitch of the support frame exceeds the length of the segments with the teeth 72 by the amount of movement in the Z-axis direction in order to provide the same force effect for all Z positions.
    Due to the well-controlled control of the leakage currents in the coils 74, the individual 1 and the poles are analogous to
    FOR Z drive, maybe stepper
    (indexed) rotational motion of the rotor (support frame 50) relative to the poles, in the drive Z, where only 3 modes +1, O, -1 are possible for the current in the coils, for the drive M, the coil currents change only in very small intervals. The change (adjustment) occurs almost continuously in the positive and negative range of limiting currents.
    权利要求:
    Claims (1)
    [1]
    Invention Formula
    1. Servo drive, mainly in devices for testing integrated circuits on a semiconductor wafer, containing a faceplate mounted on the spindle sleeve, me13
    The lifting and rotation of the faceplate with electromagnetic elements, ferromagnetic dies, air damping bearing and disk, characterized in that, in order to improve the positioning accuracy, it is equipped with a bearing ring with grooves and with a cylindrical body located inside it with upper and lower support plates and a lifting electromagnet located inside the case, while the electromagnetic elements of the mechanism of rotation of the faceplate are placed in the recesses of the bearing ring, and one of the ferromagnetic g The child is placed on the case surface with the possibility of interaction with the electromagnetic elements of the rotation mechanism, the electromagnetic elements of the faceplate vertical movement mechanism are placed on the base, and the second ferromagnetic crest is made on the cylindrical surface of the disk mounted on the sliding sleeve rotatably and kinematically connected with the hoist electromagnet.
    A servo drive according to claim 1, characterized in that the lifting electromagnet is made with upper m lower supporting surfaces on which air nozzles are provided at evenly spaced distances for connection with the air supply system, and the lifting electromagnet is installed with the possibility of interaction with the upper and lower support plates of the case,
    3. A servo drive according to claim 1, characterized in that air nozzles are made on the inner surface of the bearing ring to be connected to the air supply system.
    A. Servo drive according to claim 1, characterized in that the disk with the ferromagnetic comb is equipped with a jack
    15 20 - 2 & and
    thirty
    i
    .
    35
    40
    78614
    which is screwed onto the external thread of the spindle sleeve.
    5. The servo drive according to claim 1, characterized in that the poles of the electromagnetic elements are made in the form of a comb, the tooth pitch of which is equal to the pitch of the teeth of the ferromagnetic comb on the disk, with the tooth pitch between the poles shifted relative to the yube comb on the disk.
    6. A servo drive according to claim 1, characterized in that the mechanism for vertical movement is provided with an axial (thrust) bearing connected to the nut and with a sleeve to a lifting electromagnet.
    7. A servo drive according to claim 1, characterized in that it is provided with a separator ball bearing placed between the bearing surface of the spindle sleeve and the bearing surface of the lifting electromagnet sleeve.
    8. The servo drive according to claim 1, in accordance with claim 1, so that the lifting electromagnet is equipped with one or several permanent magnets.
    9. Servo drive according to claim 1, distinguished by the fact that it is provided with a support ring fixed with iiGtiom insulators, threaded bushings and screws on the upper plate of the cylindrical body.
    10.- Servo drive according to claim 1, characterized in that the faceplate is provided with a sealing piston movably mounted relative to the faceplate.
    11. The servo drive according to claim 1, which is equipped with photo sensors with mirror elements, one of the mirror elements placed between the tooth and the toothed wheel, and the other mirror element placed on the case c. possibility of interaction with the photo sensor in the limits of the lower position of the nut relative to the spindle.
    //
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    同族专利:
    公开号 | 公开日
    HU183574B|1984-05-28|
    DD155863A3|1982-07-14|
    US4448403A|1984-05-15|
    JPS57124450A|1982-08-03|
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DD22588580A|DD155863A3|1980-12-09|1980-12-09|ACTUATOR|
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